O. Shiman and V. Gerbreders and E. Sledevskis and A. Bulanovs and V.Pashkevich
Selective WetEtching of AmorphousCrystallized Sb20se80 Thin Films
284 - 287
2011
5
3
International Journal of Physical and Mathematical Sciences
https://publications.waset.org/pdf/2215
https://publications.waset.org/vol/51
World Academy of Science, Engineering and Technology
The selective wetetching of amorphous and
crystalline region of Sb20Se80 thin films was carried out using organic
based solution e.g. amines. We report the development of an in situ
realtime method to study the wet chemical etching process of thin
films. Characterization of the structure and surface of films studied
by Xray diffraction, SEM and EBSD methods has been done and
potential application suggested.
Open Science Index 51, 2011