WASET
    Dirk Hegemann and  Martin Amberg,  Energetic Considerations for Sputter Deposition Processes.   journal   = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology.
    July 2013, vol. 79(7). 1160 - 1163
    [viewed 25 April 2024]. Available from: https://publications.waset.org/pdf/16460.