%0 Journal Article
	%A Saktioto and F.D Ismail and  P.P. Yupapin and  J. Ali
	%D 2009
	%J International Journal of Chemical and Molecular Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 36, 2009
	%T Thermodynamic Equilibrium of Nitrogen Species Discharge: Comparison with Global Model
	%U https://publications.waset.org/pdf/15759
	%V 36
	%X The equilibrium process of plasma nitrogen species by
chemical kinetic reactions along various pressures is successfully
investigated. The equilibrium process is required in industrial
application to obtain the stable condition when heating up the
material for having homogenous reaction. Nitrogen species densities
is modeled by a continuity equation and extended Arrhenius form.
These equations are used to integrate the change of density over the
time. The integration is to acquire density and the reaction rate of
each reaction where temperature and time dependence are imposed.
A comparison is made with global model within pressure range of 1-
100mTorr and the temperature of electron is set to be higher than
other nitrogen species. The results shows that the chemical kinetic
model only agrees for high pressure because of no power imposed;
while the global model considers the external power along the
pressure range then the electron and nitrogen species give highly
quantity densities by factor of 3 to 5.
	%P 655 - 659