%0 Journal Article
	%A R. Chimchang and  R. Tongta and  R. Phatthanakun
	%D 2012
	%J International Journal of Electronics and Communication Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 65, 2012
	%T Vertical Micromirror Fabrication by X-ray Lithography for Single Mode Optical Fiber Switching Applications
	%U https://publications.waset.org/pdf/1469
	%V 65
	%X Inthis paper, design and fabrication of vertical
micromirror for optical switching applications of single mode optical
fibers are proposed. The structure of micromirror will be created
from negative photoresist (SU-8) on X-ray lithography using X-ray
from synchrotron light source. The properties of X-ray from
synchrotron light source are high-energy electrons which can
construct materials that have a high aspect ratio. In addition, the
technique of gold coating of reflective material has been used for
change direction of light between two pairs of optical fibers. At a
wavelength of 1310 nm with minimum average loss of 5.305 dB is
obtained.
	%P 501 - 504