Satoru Kaneko and Takeshi Ito and Kensuke Akiyama and Manabu Yasui and Chihiro Kato and Satomi Tanaka and Yasuo Hirabayashi and Takeshi Ozawa and Akira Matsuno and Takashi Nire and Hiroshi Funakubo and Mamoru Yoshimoto, Effect of CW Laser Annealing on Silicon Surface for Application of Power Device. journal = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology. February 2011, vol. 50(2). 206 - 208 [viewed 20 September 2024]. Available from: https://publications.waset.org/pdf/13358.