@article{(Open Science Index):https://publications.waset.org/pdf/12040, title = {Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate}, author = {Wei Sun and Ruilin Zheng and Xuyuan Chen}, country = {}, institution = {}, abstract = {Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper, we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods. }, journal = {International Journal of Electrical and Computer Engineering}, volume = {3}, number = {10}, year = {2009}, pages = {1785 - 1788}, ee = {https://publications.waset.org/pdf/12040}, url = {https://publications.waset.org/vol/34}, bibsource = {https://publications.waset.org/}, issn = {eISSN: 1307-6892}, publisher = {World Academy of Science, Engineering and Technology}, index = {Open Science Index 34, 2009}, }