Jia-Chuan Lin and Meng-Kai Hsu and Hsi-Ting Hou and Sin-Hong Liu
Improvement of Photoluminescence Uniformity of Porous Silicon by using Stirring Anodization Process
15 - 18
2012
6
1
International Journal of Materials and Metallurgical Engineering
https://publications.waset.org/pdf/10486
https://publications.waset.org/vol/61
World Academy of Science, Engineering and Technology
The electrolyte stirring method of anodization etching
process for manufacturing porous silicon (PS) is reported in this work.
Two experimental setups of nature air stirring (PSASM) and
electrolyte stirring (PSESM) are employed to clarify the influence of
stirring mechanisms on electrochemical etching process. Compared to
traditional fabrication without any stirring apparatus (PSTM), a large
plateau region of PS surface structure is obtained from samples with
both stirring methods by the 3Dprofiler measurement. Moreover, the
light emission response is also improved by both proposed electrolyte
stirring methods due to the cycling force in electrolyte could
effectively enhance etchcarrier distribution while the electrochemical
etching process is made. According to the analysis of statistical
calculation of photoluminescence (PL) intensity, lower standard
deviations are obtained from PSsamples with studied stirring methods,
i.e. the uniformity of PLintensity is effectively improved. The
calculated deviations of PLintensity are 93.2, 74.5 and 64,
respectively, for PSTM, PSASM and PSESM.
Open Science Index 61, 2012