A. Manallah and C. Meier, Surface Topography Measurement by Confocal Spectral Interferometry. journal = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology. May 2017, vol. 127(7). 273 - 276 [viewed 21 September 2024]. Available from: https://publications.waset.org/pdf/10007419.