@article{(Open Science Index):https://publications.waset.org/pdf/10007419,
	  title     = {Surface Topography Measurement by Confocal Spectral Interferometry},
	  author    = {A. Manallah and  C. Meier},
	  country	= {},
	  institution	= {},
	  abstract     = {Confocal spectral interferometry (CSI) is an innovative optical method for determining microtopography of surfaces and thickness of transparent layers, based on the combination of two optical principles: confocal imaging, and spectral interferometry. Confocal optical system images at each instant a single point of the sample. The whole surface is reconstructed by plan scanning. The interference signal generated by mixing two white-light beams is analyzed using a spectrometer. In this work, five ‘rugotests’ of known standard roughnesses are investigated. The topography is then measured and illustrated, and the equivalent roughness is determined and compared with the standard values.
},
	    journal   = {International Journal of Physical and Mathematical Sciences},
	  volume    = {11},
	  number    = {7},
	  year      = {2017},
	  pages     = {273 - 276},
	  ee        = {https://publications.waset.org/pdf/10007419},
	  url   	= {https://publications.waset.org/vol/127},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 127, 2017},
	}