R. Resmi and  M. R. Baiju,  Analysis of Thermal Damping in Si Based Torsional Micromirrors.   journal   = {International Journal of Electronics and Communication Engineering}, [online]. World Academy of Science, Engineering and Technology.
    March 2017, vol. 123(3). 322 - 326
    [viewed 04 May 2024]. Available from: https://publications.waset.org/pdf/10006819.