S. Zhuiykov and Zh. Hai and H. Xu and C. Xue, Development of Single Layer of WO3 on Large Spatial Resolution by Atomic Layer Deposition Technique. journal = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology. January 2017, vol. 121(1). 46 - 49 [viewed 23 September 2024]. Available from: https://publications.waset.org/pdf/10006167.