Andrey V. Osipov and Sergey A. Kukushkin and Andrey V. Lukâyanov, Topochemical Synthesis of Epitaxial Silicon Carbide on Silicon. journal = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology. September 2016, vol. 119(11). 1361 - 1364 [viewed 20 September 2024]. Available from: https://publications.waset.org/pdf/10005734.