WASET
    K. Abbas and  R. Ahmad and  I. A. Khan and  S. Saleem and  U. Ikhlaq,  Influence of Argon Gas Concentration in N2-Ar Plasma for the Nitridation of Si in Abnormal Glow Discharge.   journal   = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology.
    May 2016, vol. 115(7). 858 - 870
    [viewed 25 April 2024]. Available from: https://publications.waset.org/pdf/10004869.