%0 Journal Article
	%A Branko Skoric and  Aleksandar Miletic and  Pal Terek and  Lazar Kovacevic and  Milan Kukuruzovic 
	%D 2016
	%J International Journal of Materials and Metallurgical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 111, 2016
	%T Nano Effects of Nitrogen Ion Implantation on TiN Hard Coatings Deposited by PVD and IBAD
	%U https://publications.waset.org/pdf/10003996
	%V 111
	%X In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N5+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. A variety of analytic techniques were used for characterization, such as scratch test, calo test, Scanning electron microscopy (SEM), Atomic Force Microscope (AFM), X-ray diffraction (XRD) and Energy Dispersive X-ray analysis (EDAX).
	%P 335 - 340