Electrotechnology for Silicon Refining: Plasma Generator and Arc Furnace: Installations and Theoretical Base

Authors: Ashot Navasardian, Mariam Vardanian, Vladik Vardanian

Abstract:

The photovoltaic and the semiconductor industries are in growth and it is necessary to supply a large amount of silicon to maintain this growth. Since silicon is still the best material for the manufacturing of solar cells and semiconductor components so the pure silicon like solar grade and semiconductor grade materials are demanded. There are two main routes for silicon production: metallurgical and chemical. In this article, we reviewed the electrotecnological installations and systems for semiconductor manufacturing. The main task is to design the installation which can produce SOG Silicon from river sand by one work unit.

Keywords: Metallurgical grade silicon, solar grade silicon, impurity, refining, plasma.

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1110313

References:

[1] Jafar Safariana, Gabriella Tranella, Merete Tangstada. Technoport RERC Research 2012 "Processes for upgrading metallurgical grade silicon to solar grade silicon"
[2] Afanasyev VD; VD Gorokhov, BG Gribov, Evdokimov BA, KV Zinoviev, GY Krasnikov; Patent RU № 2367600 "Method of obtaining high-purity silicon "
[3] A. Kravtsov Patent RU № 2403300 "Method of vacuum cleaning silicon and device for its implementation "
[4] Falkeevich E.S semiconductor silicon technology. Moscow, Metallurgy, 1992.
[5] VA Karelin Patent RU № 2078034 "Method of obtaining high-purity polycrystalline silicon "
[6] A. Kravtsov Patent RU № 2403299 "Method for vacuum cleaning of silicon and device for its implementation "
[7] Low-temperature plasma. Authors VD Parkhomenko, PI Soroka, Y. Krasnokutsky.
[8] Structure and properties of the structures Si-SiO2-M V. N. Vertoprahov BM Kuchumov E. G. Salman 1981
[9] Thermodynamics of evaporation of oxides. EK Kazenas, Y. Tsvetkov
[10] Technology of semiconductor and dielectric materials Yu.M.Tairov VF Tsvetkov. 2002.