%0 Journal Article
	%A Andrew Randles and  Ilker Ocak and  Cheam Daw Don and  Navab Singh and  Alex Gu
	%D 2015
	%J International Journal of Electronics and Communication Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 105, 2015
	%T The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9 DOF Platform
	%U https://publications.waset.org/pdf/10002144
	%V 105
	%X Nine Degrees of Freedom (9 DOF) systems are
already in development in many areas. In this paper, an integrated
pressure sensor is proposed that will make use of an already existing
monolithic 9 DOF inertial MEMS platform. Capacitive pressure
sensors can suffer from limited sensitivity for a given size of
membrane. This novel pressure sensor design increases the sensitivity
by over 5 times compared to a traditional array of square diaphragms
while still fitting within a 2 mm x 2 mm chip and maintaining a fixed
static capacitance. The improved design uses one large diaphragm
supported by pillars with fixed electrodes placed above the areas of
maximum deflection. The design optimization increases the
sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity
was also examined through simulation.
	%P 1035 - 1038